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MDA-400M

  • MDA-400M
MDA-400M

MDA-400M

MDA-400M

Semi Auto Mask Aligner
Easy operation & Installation , Handling Substrates of Various sizes , PLC control with Touch screen panel


spec

  • TypeFully manual
  • Substrate size piece to 4 inch circle
  • Beam wavelength350 ~ 450 nm
  • Beam uniformity<±3 %
  • 365 nm intensity~ 25 mW/㎠
  • Alignment method manual
  • Alignment accuracy1 um
  • Process mode Soft, Hard, Vacuum contact & Proximity
  • Process resolution1 um @ 1 um PR thickness with vacuum contact
  • Weight (kg)
  • Dimensions (mm)1080(W) * 1060(D) * 1580(H)